Characteristic modes of electrostatic comb - drive X – Y microactuators
نویسنده
چکیده
The design of dual axis microengineered comb-drive electrostatic actuators is investigated. Experimental measurements of diode-isolated bulk micromachined x–y stages with a folded, single-flexure suspension show the presence of unwanted two-dimensional vibrational mode patterns. A combination of coupled-mode and finite-element analysis is used to explain the existence of the spurious modes, and good agreement is obtained with the experimental response provided that the intrinsic stress is taken into account. It is shown that improved performance can be obtained simply by doubling the number of suspension flexures.
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تاریخ انتشار 1999